At NÜRDAM, the cleanroom covers a total area of 450 m² and is divided into four main sections, each equipped with systems necessary for the production of micro-nano technology-based radiation detectors/sensors. These sections include separate rooms for wet chemical processing and optical lithography, metallization, and testing and characterization.

In the Thin Film Technologies Laboratory, the facilities include Diffusion Furnaces (with 6 separate chambers), an Atomic-Level Layer Deposition System, a Four-Point Resistivity Measurement System, a Spectroscopic Reflectometer for Thin Film Thickness Measurement, a Metallurgical Microscope, a General-Purpose Annealing Furnace, and a Nitrogen Atmosphere Desiccator System. This area is classified as an ISO-5 standard cleanroom.